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  1. CMI - Center of MicroNanoTechnology

    The CMI is a complex of clean rooms and processing equipment for the training and scientific experimentation devoted to the users of microtechnologies.
    SEM3
    diffusion2
    cleanroom1
    MEMS1
    ICP1
    MEB1
    microelectronics1
    PVD1
    oxidation1
    CVD1
    wafers1
    FIB1
    sputtering1
    thin films1
    e-beam1
    photolithography1
    ebeam1
    NEMS1
    microfabrication1
    microsystem1
    nanofabrication1
    LPCVD1
    MOEMS1
    wet etch1
    dry etch1

    cmi.epfl.ch - 2009-04-10

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