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  1. Innovative Robotics - SCARA ROBOT WAFER TRANSPORT MASK HANDLING IR-820 3-FOUP DUAL WRIST EFEM AHMS 5th–axis flipper vacuum pneumatic Bernoulli non-contact ...

    SCARA, Selectively Compliant, Articulated Robot Arm, 4-axis, dual arm, single arm, dual wrist, end effector, edge gripper, CE compliant, SEMI compliant, ...
    overhaul1
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    3-axis1
    4-axis1
    cost of ownership1
    end effector1
    EFEM1
    FOUP1
    FOSB1
    edge gripper1
    dual arm1
    CE compliant1
    Equipment Front End Module1
    SEMI compliant1
    Articulated Robot Arm1
    automatic blending1
    Class 10 cleanliness1
    Class 1 cleanliness1
    dual wrist1
    Front Opening Shipping Box1
    Front Opening Unified Pod1
    ISO 1 cleanliness1
    R-theta1
    single arm1
    Selectively Compliant1

    innovativerobotics.com - 2009-02-07

5-axis1 milling2 foup1 cad3 4-axis1 amhs1 front opening unified pod1 end effector1 edge gripper1 cam5 equipment front end module1 cnc3 control3 fosb1 automation3 machining2 cleanroom1

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